Updated from Jan. 20

Chip-equipment maker

KLA-Tencor

(KLAC) - Get Report

said its profit in the quarter ended Dec. 31 rose 171% to $122 million, or 61 cents a diluted share, from $45 million, or 22 cents a share, in the year-ago period. The profit was also modestly higher than the previous quarter's 58 cents a share.

Revenue was $533 million, up 3% from $519 million in the previous quarter, and up 57% from $339 million in the second quarter of fiscal 2004.

Analysts polled by Thomson First Call had forecast a net profit of 59 cents a share on revenue of $520 million.

The stock was up 88 cents, or 2%, to $44.19 Friday morning.

KLA-Tencor said it ended the quarter with about nine months of product-related shipment and revenue backlog, with the bulk of the growth in bookings coming from Japan. Some 36% of orders came from Japan, above the 20% average in previous quarters, the company said.