Rudolph Technologies

(RTEC) - Get Report

, a maker of semiconductor manufacturing equipment, was up 12.5% in midafternoon after reaching a 52-week high of $53.69.

The stock is up almost 94% since Jan. 10. It jumped a total of 11.75 points on Jan. 30 and 31 after the company announced strong fourth-quarter earnings.

Other chip equipment stocks were lower.

Novellus

(NVLS)

was down 2.8%.

KLA-Tencor

(KLAC) - Get Report

was off 2%.