Axcelis Technologies

(ACLS) - Get Axcelis Technologies, Inc. Report

said Monday it filed a patent infringement lawsuit against fellow semiconductor equipment company

Applied Materials

(AMAT) - Get Applied Materials, Inc. Report

.

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Axcelis claims that Applied's recently introduced medium current/high energy ion implanter machine infringes on an Axcelis patent for ion implantation equipment using radio frequency linear accelerator technology. Axcelis wants an injunction to force Applied to stop using the technology in question and is seeking monetary damages.

Axcelis, which is based in Beverly, Mass., said its patent has been confirmed twice in the last year in response to challenges by an anonymous requestor it believes was Applied. Representatives from Applied weren't immediately available for comment.

Shares of Axcelis finished at $8.44 during regular session

Nasdaq

trading, but recently climbed to $8.50 on the

Island

ECN. Applied, Santa Clara, Calif., closed at $45.75 and slipped to $45.70 after hours.