ANDOVER, Mass., July 27, 2017 (GLOBE NEWSWIRE) -- MKS Instruments, Inc. (NASDAQ:MKSI), a global provider of technologies that enable advanced processes and improve productivity, today announced the release of the MKS Granville-Phillips® Series 523-a first of its kind transducer with a wide-range vacuum gauge based on a single sensor technology. The Series 523 is also the first known polymer design for a wide-range vacuum gauge in the industry that enables multiple discharge chambers within one sensor.
Series 523 Granville-Phillips®
Wide Range Cold Cathode Transducer

A photo accompanying this announcement is available at

The use of polymer construction and innovative manufacturing methods makes the Series 523 a high value solution for a wide range of applications. Single-sensor technology allows for a wide range of vacuum measurements (10 -7 Torr to Atmosphere) without adding complexity from multiple sensor technologies. The transducer consists of only one type of sensor technology-an electric discharge in gases-that is used in a variety of ways as the pressure in a system changes.

MKS recently introduced the Series 523 at the Society of Vacuum Coater's leading industry event, SVC TechCon, in the Innovator's Showcase. A live demonstration of the Series 523 gave event participants a first-hand experience of the wide-range performance of the gauge and the simplicity of the toolless sensor replacement. Feedback on the Series 523 was overwhelmingly positive and was noted to be a paradigm shift in vacuum gauging technology. "The Series 523 is a game changer for vacuum gauging needs in industrial coatings and processes," said Chris Stone, general manager-indirect gauging, MKS Instruments.

The Series 523 Wide Range Cold Cathode Transducer is a wide-range vacuum gauge at a reasonable price point that doesn't sacrifice performance. The Series 523 offers affordable performance to customers looking to achieve maximum results with vacuum gauges to effectively monitor and optimize their processes. For more information on the Series 523, visit

About MKS Instruments MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor, and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.  Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control technology, ozone generation and delivery, RF & DC power, reactive gas generation, vacuum technology, lasers, photonics, sub-micron positioning, vibration isolation, and optics.  Our primary served markets include semiconductor capital equipment, general industrial, life sciences, and research.  Additional information can be found at 
For More Information, contact:                                                      Bill CaseyOffice: + 1 (978) 645-5400 Email:

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