Advantest Corporation (TSE: 6857, NYSE: ATE) today announced that it will begin shipments of MEMS relay samples in April 2012. Advantest developed these relays for use in semiconductor testing equipment, high-speed communications devices, high-frequency wave measurement equipment and components therein.
Advantest Enters MEMS Relay Market (Photo: Business Wire)

Advantest Enters MEMS Relay Market (Photo: Business Wire)

At present, high-frequency wave relays typically use electromagnetic or electrostatic actuation. Electromagnetic relays are big and have high power consumption. Electrostatic relays are easily affected by static electricity in the atmosphere and have high actuation voltage. Using piezoelectric actuation, Advantest’s MEMS relays solve these issues. Using Advantest’s proprietary deposition technology, the relay features a piezoelectric film only 1 micron thick, which is required to run low actuation voltage. The relay also has high reliability, using contact-point control technology honed in Advantest’s semiconductor testing equipment. The relay is smaller and uses less power than electromagnetic relays, and is superior over electrostatic relays in terms of environmental susceptibility and actuation voltage. Also, using Advantest’s high-frequency measurement technology, the relay can handle up to 20GHz high-frequency transmission.

Mass production is scheduled to begin in January 2013.

Going forward, in addition to the semiconductor testing area, Advantest will continue to introduce groundbreaking solutions in other fields such as automotive and pharmaceutical /medical care.

Product Highlights
1.   Small sized; chip thickness of 0.9mm
2. High-frequency transmission of up to 20GHz
3. Low actuation voltage of 12V

Specifications (for reference)
  Frequency range:   DC~20GHz
Actuation voltage: 12V
Contact point: SPDT
Size: 2 types – 5.4 X 4.2 X 0.9mm, 2.9 X 3.4 X 0.9mm
Isolation: >20dB (~20GHz)
Insertion loss: <1dB (~20GHz)
Characteristic impedance: 50Ω

Main applications: Semiconductor testing equipment, high-speed communications devices, high-frequency testing equipment and components therein

Sample price: ¥8,800/unit

Product Inquiries
Please contact the DI Solution Business Department at
Tel: +81-276-70-3300

About Advantest Corporation

A world-class technology company, Advantest is the leading producer of automatic test equipment (ATE) for the semiconductor industry and a premier manufacturer of measuring instruments used in the design and production of electronic instruments and systems. Its leading-edge systems and products are integrated into the most advanced semiconductor production lines in the world. The company also focuses on R&D for emerging markets that benefit from advancements in nanotech and terahertz technologies, and has recently introduced multi-vision metrology scanning electron microscopes essential to photomask manufacturing, as well as a groundbreaking 3D imaging and analysis tool. Founded in Tokyo in 1954, Advantest established its first subsidiary in 1982, in the USA, and now has subsidiaries worldwide. More information is available at

Note: All information supplied in this release is correct at the time of publication, but may be subject to change.

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