Amtech Systems, Inc. (NASDAQ: ASYS), a global supplier of production and automation systems and related supplies for the manufacture of solar cells, semiconductors, and sapphire and silicon wafers, today reported preliminary results for its fiscal 2011 second quarter ended March 31, 2011, including record revenue of approximately $60 million ($52 million solar), a 12% increase over the preceding quarter and 273% increase over the second quarter of fiscal 2010, and fiscal second quarter bookings of approximately $70 million ($60 million solar). The Company’s total order backlog at March 31, 2011 was a record $193 million, compared to $173 million at December 31, 2010. The Company expects to report final fiscal 2011 second quarter results on or about May 9, 2011. J.S. Whang, Chief Executive Officer of Amtech, commented, “Our strong preliminary revenue for the second quarter further demonstrates our technology leadership in high efficiency solar diffusion and our operational capability to manage and service this high-end growth market. With our continued success in expanding our solar market share with an increasing number of upper tier solar customers, our marketing pipeline continues to be healthy, and we continue to ramp up operations to support our record-breaking backlog and profitably manage our rapid growth.” The fiscal 2011 second quarter financial information included in this release is preliminary and subject to change based on the Company’s quarterly close procedures. About Amtech Systems, Inc. Amtech Systems, Inc. manufactures capital equipment, including silicon wafer handling automation, thermal processing equipment and related consumables used in fabricating solar cells, LED and semiconductor devices. Semiconductors, or semiconductor chips, are fabricated on silicon wafer substrates, sliced from ingots, and are part of the circuitry, or electronic components, of many products including solar cells, computers, telecommunications devices, automotive products, consumer goods, and industrial automation and control systems. The Company’s wafer handling, thermal processing and consumable products currently address the diffusion, oxidation, and deposition steps used in the fabrication of solar cells, LEDs, semiconductors, MEMS and the polishing of newly sliced silicon wafers.