The San Jose, Calif., chip equipment company made $90 million, or 44 cents a share, for the second quarter ended Dec. 31, up from the year-ago $77 million, or 38 cents a share. Revenue rose to $649 million from $488 million a year earlier.
The latest quarter included $117 million in pretax restructuring and restatement-related charges.
Analysts surveyed by Thomson Financial were looking for a 71-cent profit on revenue of $663 million.
Shares fell 75 cents early Monday to $49.25.