ANDOVER, Mass., April 17, 2014 (GLOBE NEWSWIRE) -- MKS Instruments, Inc. (Nasdaq:MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced Dynamic Frequency Tuning (DFT) technology in RF plasma generators. DFT is a patented new capability which provides significant enhancement over conventional frequency tuning schemes which require more than 500µsec of course and fine steps to search for the minima in reflected power. With DFT, measurement of power distortion is used to quickly and accurately achieve matched power in less than 50µsec. DFT assures more power is delivered to the process and not mismatched or wasted. This is important because the plasma is stabilized faster making the process more controlled, consistent and repeatable.
MKS Introduces Dynamic Frequency Tuning Patented DFT Technology Offered In RF Plasma Generators
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