Kyma's PVD of nano-columns technology deposits a high-quality layer of aluminum nitride on wafers before gallium nitride deposition. GT plans to market the technology in conjunction with its hydride vapor phase epitaxy system that's currently in development.
The combined technologies will help LED manufacturers by providing a higher throughput and lower cost solution to produce gallium nitride templates. GT already has a high-volume prototype tool using Kyma's technology, and hopes to have the tool ready for production in the first half of 2015.
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