- The industry's first complete implant platform designed specifically for advanced 3D devices, including the Purion M™ mid current implanter, the Purion H™ high current implanter and the Purion XE™ high energy implanter.
- Purion Contamination Shield™ for lowest particles, undetectable metals and no energy contamination for highest possible device yield.
- Purion Vector™ Dose and Angle Control system for precise and repeatable dopant placement for unparalleled precision engineering.
- Purion 500wph endstation, a common, cross-platform architecture that delivers the industry's highest productivity and manufacturing flexibility.
Axcelis Debuts The Purion Platform At SEMICON Korea 2014
Check Out Our Best Services for Investors
- $2.5+ million portfolio
- Large-cap and dividend focus
- Intraday trade alerts from Cramer
Access the tool that DOMINATES the Russell 2000 and the S&P 500.
- Buy, hold, or sell recommendations for over 4,300 stocks
- Unlimited research reports on your favorite stocks
- A custom stock screener
- Model portfolio
- Stocks trading below $10
- Intraday trade alerts
More than 30 investing pros with skin in the game give you actionable insight and investment ideas.