This tool enables scanning HRXRD, XRR and (GI)XRD measurements. HRXRD is capable of measuring epitaxial layer composition, thickness, density, strain and relaxation of single and multi-layer stacks. Additionally, with XRR and (GI)XRD channels, the tool provides information on the thickness, density, phase and crystallinity of ultra-thin layers typically used in the FEOL process. Unlike optical or spectroscopic tools, the HRXRD and XRR are first principle techniques that deliver accurate and precise results without calibration.About Jordan Valley Semiconductors Ltd. http://www.jvsemi.com
More Leading Semiconductor Players Selecting Jordan Valley's JVX7300LMI Metrology Tool For 14nm & 10nm Process Development And Ramp-up
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