BEVERLY, Mass., July 17, 2013 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received a follow-on order for the Company's Optima HDx high current implanter from a global semiconductor manufacturer located in the Asia Pacific Region. The customer already has a significant installed base of Optima HDx implanters, where they are being used in high volume production of leading edge memory devices.
"We're excited about the opportunity to expand our Optima HDx installed base with one of the world's leading chip manufacturers," said Mary Puma, chairman and CEO of Axcelis. "Customers are under enormous pressure to improve performance while scaling to lower geometries and implementing more complex device designs. The Optima HDx was chosen over competitive systems because it demonstrated significant low energy process and productivity advantages for their next generation leading edge application. The Optima HDx's unique spot beam and advanced beamline technology allows customers to achieve the most precise dopant placement possible, coupled with the highest beam currents for optimized system performance."
The Optima HDx high current implanter provides solutions for device manufacturers highest dose requirements with the versatility and extendibility to provide solutions beyond today's 2Xnm technology node. The Optima HDx includes the industry's most advanced ion source technology, coupled with Axcelis' innovative wafer temperature control system that maximizes yield and profitability, both of which are critical in today's challenging device manufacturing environment. The Optima HDx delivers this performance with a simple, low cost and highly reliable design, providing a significant advantage over more complex and costly designs. For more information on the innovative Optima HDx and our complete line of ion implantation systems, please visit www.axcelis.com.
About Axcelis: Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. The Company's Internet address is: www.axcelis.com.Company Contacts: Maureen Hart (editorial/media) 978.787.4266 Doug Lawson (investor relations) 978.787.9552 SOURCE Axcelis Technologies, Inc.
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