This Day On The Street
Continue to site
This account is pending registration confirmation. Please click on the link within the confirmation email previously sent you to complete registration.
Need a new registration confirmation email? Click here

SPTS Ships Etch Solutions To Europe's Leading R&D Organizations

NEWPORT, Wales, April 4, 2013 /PRNewswire/ --

SPTS Technologies, a supplier of advanced wafer processing solutions for the global semiconductor industry and related markets, today announced it has received multiple orders from several of the Europe's leading research and development (R&D) institutions, including the Delft Institute of Microsystems & Nanoelectronics (DIMES), Ecole Polytechnique Fédérale de Lausanne (EPFL), Institut FEMTO-ST (Franche-Comté Electronique Mécanique Thermique et Optique - Sciences et Technologies) and IEF (Institut d'Electronique Fondamentale). Each customer selected SPTS equipment for its process flexibility, extendibility, and long-term application potential.

     (Logo: )

Dimes is a research institute within the Delft University of Technology with cleanroom facilities where submicron electronics and MEMS technologies are combined to fabricate micro systems. Applications are medical (flexible chips in catheters), nano-instrumentation (integrated microfluidic jet systems, sensors), infrastructure (integrated radars) and energy (smart lighting). The Omega i2L Rapier system will be essential for wafer-deep etches of micromechanical structures and through silicon vias with vertical or tapered sidewalls. The selection of this system was driven by the need for a reliable DRIE system, able to fulfill the stringent process requirements.

Swiss research institute EPFL chose SPTS's advanced physical source (APS) to focus on dielectric etching. Of particular interest is controlling sidewall quality for shallow optical waveguides in silicon nitride and also etching 40µm deep trenches into fused silica glass.  The APS is characterized by a plasma density that is typically ten times higher than conventional inductively-coupled plasma (ICP) reactors, making the module well suited to etch strongly-bonded materials such as glass, and even tougher materials like silicon carbide (SiC) and sapphire.

France-based institute IEF will use their etch system for two dissimilar silicon processes - the first application involves fabricating nano trenches 80nm wide at >5:1 aspect ratio and with super smooth sidewalls (with a roughness of <6nm), with the second, a 50µm feature at 400µm deep. IEF awarded the business to SPTS following a successful demonstration which saw its Pegasus Rapier process module perform to these rigorous requirements using a single hardware set-up.

The French research organization Institut Femto-ST chose the Pegasus Rapier for their optics, sensor and actuator device development.  During the evaluation process, SPTS satisfied stringent process specifications to win the business.

1 of 2

Check Out Our Best Services for Investors

Action Alerts PLUS

Portfolio Manager Jim Cramer and Director of Research Jack Mohr reveal their investment tactics while giving advanced notice before every trade.

Product Features:
  • $2.5+ million portfolio
  • Large-cap and dividend focus
  • Intraday trade alerts from Cramer
Quant Ratings

Access the tool that DOMINATES the Russell 2000 and the S&P 500.

Product Features:
  • Buy, hold, or sell recommendations for over 4,300 stocks
  • Unlimited research reports on your favorite stocks
  • A custom stock screener
Stocks Under $10

David Peltier uncovers low dollar stocks with serious upside potential that are flying under Wall Street's radar.

Product Features:
  • Model portfolio
  • Stocks trading below $10
  • Intraday trade alerts
14-Days Free
Only $9.95
14-Days Free
Dividend Stock Advisor

David Peltier identifies the best of breed dividend stocks that will pay a reliable AND significant income stream.

Product Features:
  • Diversified model portfolio of dividend stocks
  • Updates with exact steps to take - BUY, HOLD, SELL
Trifecta Stocks

Every recommendation goes through 3 layers of intense scrutiny—quantitative, fundamental and technical analysis—to maximize profit potential and minimize risk.

Product Features:
  • Model Portfolio
  • Intra Day Trade alerts
  • Access to Quant Ratings
Real Money

More than 30 investing pros with skin in the game give you actionable insight and investment ideas.

Product Features:
  • Access to Jim Cramer's daily blog
  • Intraday commentary and news
  • Real-time trading forums
Only $49.95
14-Days Free
14-Days Free


Chart of I:DJI
DOW 17,050.75 +138.46 0.82%
S&P 500 2,013.43 +15.91 0.80%
NASDAQ 4,810.7880 +19.6360 0.41%

Free Reports

Top Rated Stocks Top Rated Funds Top Rated ETFs