New eS805 e-beam inspection systems have been shipped to leading logic and memory chip manufacturers, where they are being used to upgrade existing e-beam inspection capability or to fulfill requirements for additional inspection capacity in advanced development and production lines. To maintain high performance and productivity, the eS805 tools are backed by KLA-Tencor's global, comprehensive service network. For more information on KLA-Tencor's eS805 e-beam inspection systems, please visit the product web page at: http://www.kla-tencor.com/front-end-defect-inspection/eS800-series.html.About KLA-Tencor: KLA-Tencor Corporation, a leading provider of process control and yield management solutions, partners with customers around the world to develop state-of-the-art inspection and metrology technologies. These technologies serve the semiconductor, LED and other related nanoelectronics industries. With a portfolio of industry-standard products and a team of world-class engineers and scientists, the company has created superior solutions for its customers for more than 35 years. Headquartered in Milpitas, Calif., KLA-Tencor has dedicated customer operations and service centers around the world. Additional information may be found at www.kla-tencor.com (KLAC-P).
KLA-Tencor Announces New ES805™ Electron-Beam Inspection System
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