X5.2 and Teron 611 systems have been shipped to leading chip manufacturers in the United States and Asia, where they are being used in 28nm production and 20nm pilot lines. To maintain high performance and productivity, the X5.2 and Teron 611 tools are backed by KLA-Tencor's global, comprehensive service network. For more information on KLA-Tencor's IC fab-based reticle inspection tools, please visit the product web pages at: http://www.kla-tencor.com/front-end-defect-inspection/rapid-ic-fab-series.html.About KLA-Tencor:KLA-Tencor Corporation, a leading provider of process control and yield management solutions, partners with customers around the world to develop state-of-the-art inspection and metrology technologies. These technologies serve the semiconductor, data storage, LED, photovoltaic, and other related nanoelectronics industries. With a portfolio of industry-standard products and a team of world-class engineers and scientists, the company has created superior solutions for its customers for more than 35 years. Headquartered in Milpitas, Calif., KLA-Tencor has dedicated customer operations and service centers around the world. Additional information may be found at www.kla-tencor.com (KLAC-P).
KLA-Tencor Announces X5.2™ And Teron™ 611 Reticle Inspection Systems
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