KLA-Tencor Announces X5.2⿢ And Teron⿢ 611 Reticle Inspection Systems

X5.2 and Teron 611 systems have been shipped to leading chip manufacturers in the United States and Asia, where they are being used in 28nm production and 20nm pilot lines. To maintain high performance and productivity, the X5.2 and Teron 611 tools are backed by KLA-Tencor's global, comprehensive service network. For more information on KLA-Tencor's IC fab-based reticle inspection tools, please visit the product web pages at: http://www.kla-tencor.com/front-end-defect-inspection/rapid-ic-fab-series.html.

About KLA-Tencor:KLA-Tencor Corporation, a leading provider of process control and yield management solutions, partners with customers around the world to develop state-of-the-art inspection and metrology technologies. These technologies serve the semiconductor, data storage, LED, photovoltaic, and other related nanoelectronics industries. With a portfolio of industry-standard products and a team of world-class engineers and scientists, the company has created superior solutions for its customers for more than 35 years. Headquartered in Milpitas, Calif., KLA-Tencor has dedicated customer operations and service centers around the world. Additional information may be found at www.kla-tencor.com (KLAC-P).

Forward-Looking Statements:Statements in this press release other than historical facts, such as statements regarding the expected performance of the X5.2 or Teron 611 systems, trends in the semiconductor industry and the anticipated challenges associated with them, expected uses of the X5.2 or Teron 611 tools by KLA-Tencor's customers, expected extendibility of the X5.2 or Teron 611 tools to accommodate new functionality, and the anticipated cost, operational and other benefits realizable by users of the X5.2 or Teron 611 tools, are forward-looking statements, and are subject to the Safe Harbor provisions created by the Private Securities Litigation Reform Act of 1995. These forward-looking statements are based on current information and expectations, and involve a number of risks and uncertainties. Actual results may differ materially from those projected in such statements due to various factors, including delays in the adoption of new technologies (whether due to cost or performance issues or otherwise), the introduction of competing products by other companies or unanticipated technological challenges or limitations that affect the implementation, performance or use of KLA-Tencor's products.

SOURCE KLA-Tencor Corporation

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