CHELMSFORD, Mass., Aug. 27, 2012 (GLOBE NEWSWIRE) -- Brooks Automation, Inc. (Nasdaq:BRKS) announces the release of the Granville-Phillips 835 Vacuum Quality Monitor TM (VQM TM) and the 835 VQM Differential Pump System (DPS). The 835 VQM builds on the award winning 830 VQM with multiple customer-requested features and an expanded 1-300 amu measurement range. The 835 VQM DPS allows for operation and process control in semiconductor, coating and other higher pressure applications by allowing operation up to 3 Torr.
Brooks Automation Announces Two Product Extensions To The Innovative Vacuum Quality Monitor Line
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