This account is pending registration confirmation. Please click on the link within the confirmation email previously sent you to complete registration.
Need a new registration confirmation email? Click here
Stocks Under $10 with 50-100% upside potential - 14 days FREE!

Brooks Automation Announces Two Product Extensions To The Innovative Vacuum Quality Monitor Line

CHELMSFORD, Mass., Aug. 27, 2012 (GLOBE NEWSWIRE) -- Brooks Automation, Inc. (Nasdaq:BRKS) announces the release of the Granville-Phillips 835 Vacuum Quality Monitor TM (VQM TM) and the 835 VQM Differential Pump System (DPS). The 835 VQM builds on the award winning 830 VQM with multiple customer-requested features and an expanded 1-300 amu measurement range. The 835 VQM DPS allows for operation and process control in semiconductor, coating and other higher pressure applications by allowing operation up to 3 Torr.

Interfacing to the VQM software is easy with the new API (Application Programmers Interface) that can be linked with users programs to provide complete control over the VQM and allow reading of gas composition data. There is also a new VQI (Vacuum Quality Index) function where users can enter an equation which drives a digital output, an audible alarm, or the start of data logging. As an example, being able to start a process when total pressure is low enough, the water level has decreased beyond a certain level, and the reactive gas level is equal to a specified amount is highly desired by many customers.

Measurement sensitivity is greatly increased with the 835 VQM through numerous features including a larger A/D, improved electrometer, lower noise, and software data analysis improvements. The 835 VQM makes maintenance simple by providing a field replaceable electron multiplier to go along with the field replaceable filament making all consumables field replaceable.

The 835 VQM DPS provides real-time information that can be used to optimize PVD, implant, coating and other vacuum processes to increase productivity, improve results, and save money. Since most processes occur in a higher vacuum level (typically in the mTorr range), differential pumping is required to reduce the process chamber pressure to the operating range of the VQM (below 1E-5 Torr). The 835 VQM DPS has a gate valve with an orifice. During base out, the gate valve is open providing the VQM with a high conductance path directly to the process chamber for greater sensitivity and accuracy. During process, the gate valve is closed and a turbo pump is used to reduce pressure through the limited conductance of the orifice. The valve can be manually or pneumatically controlled.

1 of 2

Select the service that is right for you!

COMPARE ALL SERVICES
Action Alerts PLUS
Try it NOW

Jim Cramer and Stephanie Link actively manage a real portfolio and reveal their money management tactics while giving advanced notice before every trade.

Product Features:
  • $2.5+ million portfolio
  • Large-cap and dividend focus
  • Intraday trade alerts from Cramer
  • Weekly roundups
TheStreet Quant Ratings
Try it NOW
Only $49.95/yr

Access the tool that DOMINATES the Russell 2000 and the S&P 500.

Product Features:
  • Buy, hold, or sell recommendations for over 4,300 stocks
  • Unlimited research reports on your favorite stocks
  • A custom stock screener
  • Upgrade/downgrade alerts
Stocks Under $10
Try it NOW

David Peltier, uncovers low dollar stocks with extraordinary upside potential that are flying under Wall Street's radar.

Product Features:
  • Model portfolio
  • Stocks trading below $10
  • Intraday trade alerts
  • Weekly roundups
Dividend Stock Advisor
Try it NOW

Jim Cramer's protege, David Peltier, identifies the best of breed dividend stocks that will pay a reliable AND significant income stream.

Product Features:
  • Diversified model portfolio of dividend stocks
  • Alerts when market news affect the portfolio
  • Bi-weekly updates with exact steps to take - BUY, HOLD, SELL
Real Money Pro
Try it NOW

All of Real Money, plus 15 more of Wall Street's sharpest minds delivering actionable trading ideas, a comprehensive look at the market, and fundamental and technical analysis.

Product Features:
  • Real Money + Doug Kass Plus 15 more Wall Street Pros
  • Intraday commentary & news
  • Ultra-actionable trading ideas
Options Profits
Try it NOW

Our options trading pros provide daily market commentary and over 100 monthly option trading ideas and strategies to help you become a well-seasoned trader.

Product Features:
  • 100+ monthly options trading ideas
  • Actionable options commentary & news
  • Real-time trading community
  • Options TV
To begin commenting right away, you can log in below using your Disqus, Facebook, Twitter, OpenID or Yahoo login credentials. Alternatively, you can post a comment as a "guest" just by entering an email address. Your use of the commenting tool is subject to multiple terms of service/use and privacy policies - see here for more details.
Submit an article to us!
DOW 16,960.57 -123.23 -0.72%
S&P 500 1,978.34 -9.64 -0.48%
NASDAQ 4,449.5640 -22.5440 -0.50%

Brokerage Partners

Rates from Bankrate.com

  • Mortgage
  • Credit Cards
  • Auto

Free Newsletters from TheStreet

My Subscriptions:

After the Bell

Before the Bell

Booyah! Newsletter

Midday Bell

TheStreet Top 10 Stories

Winners & Losers

Register for Newsletters
Top Rated Stocks Top Rated Funds Top Rated ETFs