BEVERLY, Mass., July 24, 2012 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that its Optima HDx high current implanter has achieved a new industry milestone in source life performance, by delivering over 500 hours of source life for carbon and germanium species independently. The system combines revolutionary ion source technology, the Eterna ELS3, with SPECTRA ™ Solifex, an innovative, new gas delivery system designed for Axcelis by The Linde Group's Gases Division. Together, these technologies significantly extend source life for carbon and germanium applications, providing chipmakers increased system availability, higher overall productivity, and lower cost of consumables; all translating to a compelling cost of ownership advantage.
"We're pleased to be able to offer customers this cost of ownership advantage, which reduces the annual operating cost of the fab," said
Bill Bintz, Executive Vice President of Product Development, Engineering and Marketing. "Our Eterna ELS3 source, supported by the Linde SPECTRA
™ Solifex gas delivery system, is already in the field with leading logic and memory customers and they are experiencing remarkable performance results. We partnered with Linde because of their expertise to develop, deliver and support this new technology in the field. We look forward to working with them on additional performance enhancements in the future."
With the Eterna ELS3, Axcelis has leveraged its ion source technology expertise to deliver the industry's next generation in source performance for the sub 2Xnm node. The Eterna ELS3 includes patent pending hardware and process improvements designed to extend source life by an unprecedented 500% improvement for Carbon, and a 500% improvement for Germanium applications. The system is available as an option on new Optima HDx tools, as well as an upgrade to installed systems.
Select the service that is right for you!COMPARE ALL SERVICES
Jim Cramer and Stephanie Link actively manage a real portfolio and reveal their money management tactics while giving advanced notice before every trade.
- $2.5+ million portfolio
- Large-cap and dividend focus
- Intraday trade alerts from Cramer
- Weekly roundups
Access the tool that DOMINATES the Russell 2000 and the S&P 500.
- Buy, hold, or sell recommendations for over 4,300 stocks
- Unlimited research reports on your favorite stocks
- A custom stock screener
- Upgrade/downgrade alerts
Jim Cramer's protege, David Peltier, identifies the best of breed dividend stocks that will pay a reliable AND significant income stream.
- Diversified model portfolio of dividend stocks
- Alerts when market news affect the portfolio
- Bi-weekly updates with exact steps to take - BUY, HOLD, SELL
All of Real Money, plus 15 more of Wall Street's sharpest minds delivering actionable trading ideas, a comprehensive look at the market, and fundamental and technical analysis.
- Real Money + Doug Kass Plus 15 more Wall Street Pros
- Intraday commentary & news
- Ultra-actionable trading ideas
Our options trading pros provide daily market commentary and over 100 monthly option trading ideas and strategies to help you become a well-seasoned trader.
- 100+ monthly options trading ideas
- Actionable options commentary & news
- Real-time trading community
- Options TV