This Day On The Street
Continue to site
This account is pending registration confirmation. Please click on the link within the confirmation email previously sent you to complete registration.
Need a new registration confirmation email? Click here

Axcelis To Showcase Enabling Implant And Plasma Cleaning Solutions At SEMICON China 2012

BEVERLY, Mass., March 16, 2012 /PRNewswire/ --  Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it will showcase its latest advancements in ion implantation and plasma dry strip technology at SEMICON China 2012. The show is being held March 20-22, at the Shanghai New International Exhibition Center (SNIEC) in Shanghai, China. 

Please visit the Axcelis showcase at Booth #3501, in Hall 3, to learn more about our newest technology, designed to usher in a new era of precision, purity and productivity in IC manufacturing:
  • Optima XEx™ high energy implanter is the world's #1 high energy system, featuring the broadest energy range and highest beam currents for unmatched productivity.  Its unique endstation and LINAC beamline ensures the industry's lowest metals levels, for superior image sensor performance.
  • Optima HDx™ high current implanter's enabling spot beam technology combined with its proprietary wafer temperature control delivers higher yields and profitability critical for today's challenging device manufacturing environment. The system features the new Eterna ELS3 source, designed to extend source life by an unprecedented 500% improvement for Carbon, and a 300% improvement for Germanium applications for shallow junctions in sub 2Xnm nodes. 
  • Optima MDxt™ mid current implanter is an exciting new entrant to the market, delivering unmatched levels of productivity and energy purity across the broadest range of medium current implant applications. Its precision angle control, patented energy filter and constant focal length scanning minimizes device performance variation, providing the highest yield possible.
  • Integra ES™ plasma cleaning system is the only product on the market capable of delivering enhanced device performance benefits with production-proven, non-oxidizing processes, to maximize dopant retention for sub-2Xnm logic devices.  The system also features an innovative, modular, cluster design for outstanding manufacturing flexibility and speed for optimized return on your equipment investment. 

The company is also participating in the China Semiconductor Technology International Conference (CSTIC), the largest semiconductor technology conference in China, held in conjunction with the show on March 18-19, at the Kerry Hotel in Shanghai, China. Axcelis technologists will be presenting several talks:

CSTIC 2012  Highlights Sunday, March 18, 14:00-14:25PM Symposium VI:  Materials and Process Integration for Device Interconnection A Comprehensive Study of Low Temperature and Molecular Carbon Implantation for sub-28nm Device Fabrication, by Steve Zhao, Mike Ameen and Leonard Rubin of Axcelis Technologies Monday, March 19, 15:50-16:05 Symposium III:  Dry & Wet Etch and Clean Study of Post Plasma Doping Photoresist Strip, by Shijian Luo of Axcelis Technologies

Axcelis Technologies, Inc. (Nasdaq: ACLS) headquartered in Beverly, Massachusetts, USA, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. For more information, visit:

Company Contacts: Maureen Hart (editorial/media) 978.787.4266

Jay Zager (financial community) 978.787.9408

SOURCE Axcelis Technologies, Inc.

Copyright 2011 PR Newswire. All rights reserved. This material may not be published, broadcast, rewritten or redistributed.

Check Out Our Best Services for Investors

Action Alerts PLUS

Portfolio Manager Jim Cramer and Director of Research Jack Mohr reveal their investment tactics while giving advanced notice before every trade.

Product Features:
  • $2.5+ million portfolio
  • Large-cap and dividend focus
  • Intraday trade alerts from Cramer
Quant Ratings

Access the tool that DOMINATES the Russell 2000 and the S&P 500.

Product Features:
  • Buy, hold, or sell recommendations for over 4,300 stocks
  • Unlimited research reports on your favorite stocks
  • A custom stock screener
Stocks Under $10

David Peltier uncovers low dollar stocks with serious upside potential that are flying under Wall Street's radar.

Product Features:
  • Model portfolio
  • Stocks trading below $10
  • Intraday trade alerts
14-Days Free
Only $9.95
14-Days Free
Dividend Stock Advisor

David Peltier identifies the best of breed dividend stocks that will pay a reliable AND significant income stream.

Product Features:
  • Diversified model portfolio of dividend stocks
  • Updates with exact steps to take - BUY, HOLD, SELL
Trifecta Stocks

Every recommendation goes through 3 layers of intense scrutiny—quantitative, fundamental and technical analysis—to maximize profit potential and minimize risk.

Product Features:
  • Model Portfolio
  • Intra Day Trade alerts
  • Access to Quant Ratings
Real Money

More than 30 investing pros with skin in the game give you actionable insight and investment ideas.

Product Features:
  • Access to Jim Cramer's daily blog
  • Intraday commentary and news
  • Real-time trading forums
Only $49.95
14-Days Free
14-Days Free
AAPL $94.99 0.00%
FB $99.54 0.00%
GOOG $678.11 0.00%
TSLA $148.25 0.00%
YHOO $26.82 0.00%


Chart of I:DJI
DOW 16,014.38 -12.67 -0.08%
S&P 500 1,852.21 -1.23 -0.07%
NASDAQ 4,268.7630 -14.99 -0.35%

Free Reports

Top Rated Stocks Top Rated Funds Top Rated ETFs